Feature:
1. XQ15-GⅢ laser plane interferometer, has the same feature as XQ15-GⅠ, is more practical than XQ15-GⅠ.
2. It can be utilized at the working room for uotume produetion.
3. it is more praetical for bolting test of large plate production lines.
Technical Parameters:
1.Transmission Flat（A），working dia. D=Φ146mm, PV<0.03μm(λ/20,@632.8nm)
2.Reference Flat (B) , working dia. D=Φ146mm, PV<0.03μm(λ/20,@632.8nm)
3.Optical Collimation System —————— working dia. D=Φ146mm，focal length f=200mm
4.Light Source ———————Laser ZN250(HE-NE)
5.Max Working Size ——————550×550×250mm
