Measurement Software

PhaseStation Software Module	Scanning Method	Single - Plane Interferometry(note1）	Dual - Plane Interferometry(note2)
PhaseStation Static(note3)	NON	✓	×
PhaseStation PSI	Piezoelectric Actuator	✓	×
PhaseStation MST	Wavelength Tuning	✓	✓

Note 1: Suitable for most workpieces.
Note 2: Usually used for transparent workpieces to measure the flatness of the upper and lower surfaces and thickness simultaneously.
Note 3: Basic version, not recommended for high - precision measurement.

Main Unit

Model	Measurement Size (Circular - Diameter)¹	Vertical Use	Horizontal Use
Type100	102 mm	✓	✓
Type150	152.4 mm	✓	✓
Type250	250 mm	✓	✓
Type340²	340 mm	✓	✓
Type450	457.2 mm	×	✓
Type600	609.6 mm	×	✓

Note 1: Better measurement results can be obtained when used within 80% of the diameter.
Note 2: Horizontal use is recommended; vertical use will reduce accuracy.

Measurement Accuracy     
 

Type	Type 100 - 250	Type 340	Type 450 - 600
Absolute Accuracy PV	31.64nm or 1/20λ	42.19nm or 1/15λ	63.28nm or 1/10λ
Repeatability Accuracy PV(2σ)	6.328nm or 1/100λ	8.437nm or 1/75λ	12.66nm or 1/50λ

Note 1: Absolute accuracy is defined as the "absolute accuracy of the reference mirror of transmission elements". The actual measurement absolute accuracy = absolute accuracy + repeatability accuracy.
Note 2: λ is defined as the wavelength of the helium - neon laser, 632.8 nm.
Note 3: This accuracy is the accuracy of the standard transmission flats provided by ZPhaseStation™. For higher accuracy requirements, please contact sales personnel.
Note 4: The accuracy of transmission spheres is usually lower than that of transmission flats. For specific values, please contact sales personnel for confirmation.