Inheriting and Advancing the Practicality and Durability of the XQ15-GIII Laser Plane Interferometer.
Purpose
Technical Parameters
This Instrument finds Broader Application in Production Workshops of Mass Production Units. It is Utilized for the Detection of Flatness in Large-Aperture Planes and Prism Surfaces, High-Precision Parallelism (Angle) Measurement, and is Especially Suited for Rapid Screening Applications in Large Plate Production Lines.
Transmission Flat (A)
Working dia. D=Φ250mm,PV<0.045μm(λ/15)
Reference Flat (B)
Working dia. D=Φ250mm,PV<0.045μm(λ/15)
Optical Collimation System
Working dia. D=Φ250mm,focal length f=590mm, wavefront aberration<λ/10